SHVLP-IP
DESCRIPTION
The SHVLP-IP series comprises programmable high-voltage power supplies for sputter ion pumps, designed for installation in a server rack. The lineup includes models with positive and negative polarity, stepped output voltage of 3–5–7 kV (Step-mode) and power from 20 W to 700 W. All models are equipped with digital control interfaces, and step programming is available over the entire current and voltage range (from 0 to nominal). For the user's convenience, PC software is supplied, and the data transfer protocol is open for integration into custom control systems. A set of protections with adjustable thresholds is implemented, as well as manual adjustment by current, voltage and power. The models provide precision current measurement (from 100 nA) for monitoring the state of the vacuum system. Event logging: protection trips, steps and currents are recorded in non-volatile memory.
FEATURES
- Input power protection
- Overload and short circuit protection
- Output over/under voltage protection
- Arc protection
- Active PFC with 99% efficiency
- Stepped regulation 3-5-7 kV (Step-mode)
- Precision current measurement from 100 nA
- Support for digital interfaces RS-232, RS-485, USB, Ethernet
- Intuitive user software
- Logging of all events
- Fanless design for cleanroom environments
- Production, support and service - Russian Federation
APPLICATION
- Sputter ion pumps of the NMD/NMDI/NMDO series
- Vacuum chambers in research laboratories and industry
- Electron and ion microscope systems (SEM/TEM)
- Lithography and microelectronics equipment
- Accelerator complexes and synchrotrons
- Analytical equipment (XPS, SIMS, spectrometers)
- Processes requiring ultra-high vacuum (UHV/XHV)
| The lineup | Rated power, W | Output voltage at rated power, kV | Maximum current, mA | Peak-to-peak output voltage ripple, % |
|---|---|---|---|---|
| SHVLP-IP-20* | 20 | 3-5-7 (stepped regulation) | to 2.9 | <0.1 |
| SHVLP-IP-50* | 50 | to 7.1 | <0.1 | |
| SHVLP-IP-100* | 100 | to 14.3 | <0.1 | |
| SHVLP-IP-200* | 200 | to 28.6 | <0.1 | |
| SHVLP-IP-400* | 400 | to 65.1 | <0.1 | |
| SHVLP-IP-700* | 700 | to 100 | <0.1 |
* Polarity: P – positive, N – negative.
